![]() ![]() This is a contact profilometer capable of measuring step heights that range from tens of nanometers to one millimeter. (none) Bruker DektakXT Contact Profilometer Coral ID: ![]() DetailsĪccomodates substrate from chips up to 100mm diameter wafers. Argon Coral ID:Īrgon dual-cylinder switching manifold DetailsĪrgon is 99.999% pure (Linde AR 5.0UH-T) Materials Restrictionsīarrel asher used to strip resist or other organic films, descum patterned resist, or clean surfaces of residual organics using an isotropic oxygen plasma. Configured for exposure of 100mm wafers smaller chips can be accomodated using a carrier wafer. Uses 5in or 7in square photomasks with 0.090in thickness. ![]() An optimized process can achieve 2 um line/space patterns with a layer-to-layer registration accuracy about 3 um. Feeds panel PCB-01-N-06.īreaker located in HV room 116B Materials RestrictionsĬontact photolithography exposure tool for 100mm wafers. UW NNCI Site - WNF Lab Tool List 400V transformer Coral ID: ![]()
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